7/9/2010	12:04:48 AM	Recipe started at 12:04 AM
7/9/2010	12:04:48 AM	Helium valve closed
7/9/2010	12:04:48 AM	BCl3 valve closed
7/9/2010	12:04:48 AM	PH3 valve closed
7/9/2010	12:04:48 AM	SiCl4 pre valve closed
7/9/2010	12:04:48 AM	SiCl4 post valve closed
7/9/2010	12:04:48 AM	Main Vac valve closed
7/9/2010	12:04:48 AM	Bypass valve closed
7/9/2010	12:04:48 AM	Bubbler valve closed
7/9/2010	12:04:48 AM	H2 valve opened
7/9/2010	12:04:48 AM	Helium MFC set to  0.000000
7/9/2010	12:04:48 AM	H2 MFC set to  500.000000
7/9/2010	12:04:48 AM	BCl3 MFC set to  0.000000
7/9/2010	12:04:48 AM	PHl3 MFC set to  0.000000
7/9/2010	12:04:48 AM	SiCl4 MFC set to  0.000000
7/9/2010	12:04:48 AM	Bypass solenoid MFC set to  0.000000
7/9/2010	12:04:49 AM	Tube furnace set to 1000
7/9/2010	12:06:07 AM	Helium valve closed
7/9/2010	12:06:07 AM	BCl3 valve closed
7/9/2010	12:06:07 AM	PH3 valve closed
7/9/2010	12:06:07 AM	SiCl4 pre valve closed
7/9/2010	12:06:07 AM	SiCl4 post valve closed
7/9/2010	12:06:07 AM	Main Vac valve closed
7/9/2010	12:06:07 AM	Bypass valve closed
7/9/2010	12:06:07 AM	H2 valve opened
7/9/2010	12:06:07 AM	Bubbler valve opened
7/9/2010	12:06:07 AM	Helium MFC set to  0.000000
7/9/2010	12:06:07 AM	H2 MFC set to  500.000000
7/9/2010	12:06:07 AM	BCl3 MFC set to  0.000000
7/9/2010	12:06:07 AM	PHl3 MFC set to  0.000000
7/9/2010	12:06:07 AM	SiCl4 MFC set to  0.000000
7/9/2010	12:06:07 AM	Bypass solenoid MFC set to  0.000000
7/9/2010	12:06:07 AM	Tube furnace set to 1000
7/9/2010	12:26:07 AM	Helium valve closed
7/9/2010	12:26:07 AM	BCl3 valve closed
7/9/2010	12:26:07 AM	PH3 valve closed
7/9/2010	12:26:07 AM	Main Vac valve closed
7/9/2010	12:26:07 AM	Bypass valve closed
7/9/2010	12:26:07 AM	H2 valve opened
7/9/2010	12:26:07 AM	SiCl4 pre valve opened
7/9/2010	12:26:07 AM	SiCl4 post valve opened
7/9/2010	12:26:07 AM	Bubbler valve opened
7/9/2010	12:26:07 AM	Helium MFC set to  0.000000
7/9/2010	12:26:07 AM	H2 MFC set to  500.000000
7/9/2010	12:26:07 AM	BCl3 MFC set to  0.000000
7/9/2010	12:26:07 AM	PHl3 MFC set to  0.000000
7/9/2010	12:26:07 AM	SiCl4 MFC set to  45.000000
7/9/2010	12:26:07 AM	Bypass solenoid MFC set to  0.000000
7/9/2010	12:26:07 AM	Tube furnace set to 1000
7/9/2010	12:41:07 AM	Helium valve closed
7/9/2010	12:41:07 AM	BCl3 valve closed
7/9/2010	12:41:07 AM	PH3 valve closed
7/9/2010	12:41:07 AM	SiCl4 pre valve closed
7/9/2010	12:41:07 AM	SiCl4 post valve closed
7/9/2010	12:41:07 AM	Main Vac valve closed
7/9/2010	12:41:07 AM	Bypass valve closed
7/9/2010	12:41:07 AM	H2 valve opened
7/9/2010	12:41:07 AM	Bubbler valve opened
7/9/2010	12:41:07 AM	Helium MFC set to  0.000000
7/9/2010	12:41:07 AM	H2 MFC set to  500.000000
7/9/2010	12:41:07 AM	BCl3 MFC set to  0.000000
7/9/2010	12:41:07 AM	PHl3 MFC set to  0.000000
7/9/2010	12:41:07 AM	SiCl4 MFC set to  0.000000
7/9/2010	12:41:07 AM	Bypass solenoid MFC set to  0.000000
7/9/2010	12:41:08 AM	Tube furnace set to 750
7/9/2010	1:01:08 AM	H2 valve closed
7/9/2010	1:01:08 AM	BCl3 valve closed
7/9/2010	1:01:08 AM	PH3 valve closed
7/9/2010	1:01:08 AM	SiCl4 pre valve closed
7/9/2010	1:01:08 AM	SiCl4 post valve closed
7/9/2010	1:01:08 AM	Main Vac valve closed
7/9/2010	1:01:08 AM	Bypass valve closed
7/9/2010	1:01:08 AM	Helium valve opened
7/9/2010	1:01:08 AM	Bubbler valve opened
7/9/2010	1:01:08 AM	Helium MFC set to  500.000000
7/9/2010	1:01:08 AM	H2 MFC set to  0.000000
7/9/2010	1:01:08 AM	BCl3 MFC set to  0.000000
7/9/2010	1:01:08 AM	PHl3 MFC set to  0.000000
7/9/2010	1:01:08 AM	SiCl4 MFC set to  0.000000
7/9/2010	1:01:08 AM	Bypass solenoid MFC set to  0.000000
7/9/2010	1:01:08 AM	Tube furnace set to 0
7/9/2010	1:13:18 AM	Helium valve closed
7/9/2010	1:13:18 AM	H2 valve closed
7/9/2010	1:13:18 AM	BCl3 valve closed
7/9/2010	1:13:18 AM	PH3 valve closed
7/9/2010	1:13:18 AM	SiCl4 pre valve closed
7/9/2010	1:13:19 AM	SiCl4 post valve closed
7/9/2010	1:13:19 AM	Main Vac valve closed
7/9/2010	1:13:19 AM	Bypass valve closed
7/9/2010	1:13:19 AM	Bubbler valve closed
7/9/2010	1:13:19 AM	Helium MFC set to  0.000000
7/9/2010	1:13:19 AM	H2 MFC set to  0.000000
7/9/2010	1:13:19 AM	BCl3 MFC set to  0.000000
7/9/2010	1:13:19 AM	PHl3 MFC set to  0.000000
7/9/2010	1:13:19 AM	SiCl4 MFC set to  0.000000
7/9/2010	1:13:19 AM	Bypass solenoid MFC set to  0.000000
7/9/2010	1:13:19 AM	Tube furnace set to 0
7/9/2010	1:13:19 AM	Run finished at 1:13 AM
7/9/2010	1:13:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/9/2010	1:13:31 AM	Recipe started at 1:13 AM
7/9/2010	1:13:31 AM	Helium valve closed
7/9/2010	1:13:31 AM	H2 valve closed
7/9/2010	1:13:31 AM	BCl3 valve closed
7/9/2010	1:13:31 AM	PH3 valve closed
7/9/2010	1:13:31 AM	SiCl4 pre valve closed
7/9/2010	1:13:31 AM	SiCl4 post valve closed
7/9/2010	1:13:31 AM	Main Vac valve closed
7/9/2010	1:13:31 AM	Bubbler valve closed
7/9/2010	1:13:31 AM	Bypass valve opened
7/9/2010	1:13:31 AM	Helium MFC set to  0.000000
7/9/2010	1:13:31 AM	H2 MFC set to  0.000000
7/9/2010	1:13:31 AM	BCl3 MFC set to  0.000000
7/9/2010	1:13:31 AM	PHl3 MFC set to  0.000000
7/9/2010	1:13:31 AM	SiCl4 MFC set to  0.000000
7/9/2010	1:13:31 AM	Bypass solenoid MFC set to  0.000000
7/9/2010	1:13:31 AM	Tube furnace set to 0
7/9/2010	1:14:10 AM	Helium valve closed
7/9/2010	1:14:10 AM	H2 valve closed
7/9/2010	1:14:10 AM	BCl3 valve closed
7/9/2010	1:14:10 AM	PH3 valve closed
7/9/2010	1:14:10 AM	SiCl4 pre valve closed
7/9/2010	1:14:10 AM	SiCl4 post valve closed
7/9/2010	1:14:10 AM	Bubbler valve closed
7/9/2010	1:14:10 AM	Main Vac valve opened
7/9/2010	1:14:10 AM	Bypass valve opened
7/9/2010	1:14:10 AM	Helium MFC set to  0.000000
7/9/2010	1:14:10 AM	H2 MFC set to  0.000000
7/9/2010	1:14:10 AM	BCl3 MFC set to  0.000000
7/9/2010	1:14:10 AM	PHl3 MFC set to  0.000000
7/9/2010	1:14:10 AM	SiCl4 MFC set to  0.000000
7/9/2010	1:14:10 AM	Bypass solenoid MFC set to  0.000000
7/9/2010	1:14:10 AM	Tube furnace set to 0
7/9/2010	1:15:10 AM	H2 valve closed
7/9/2010	1:15:10 AM	BCl3 valve closed
7/9/2010	1:15:10 AM	PH3 valve closed
7/9/2010	1:15:10 AM	SiCl4 pre valve closed
7/9/2010	1:15:10 AM	SiCl4 post valve closed
7/9/2010	1:15:10 AM	Bubbler valve closed
7/9/2010	1:15:10 AM	Helium valve opened
7/9/2010	1:15:10 AM	Main Vac valve opened
7/9/2010	1:15:10 AM	Bypass valve opened
7/9/2010	1:15:10 AM	Helium MFC set to  100.000000
7/9/2010	1:15:10 AM	H2 MFC set to  0.000000
7/9/2010	1:15:10 AM	BCl3 MFC set to  0.000000
7/9/2010	1:15:10 AM	PHl3 MFC set to  0.000000
7/9/2010	1:15:10 AM	SiCl4 MFC set to  0.000000
7/9/2010	1:15:10 AM	Bypass solenoid MFC set to  0.000000
7/9/2010	1:15:10 AM	Tube furnace set to 0
7/9/2010	1:24:10 AM	Helium valve closed
7/9/2010	1:24:10 AM	H2 valve closed
7/9/2010	1:24:10 AM	BCl3 valve closed
7/9/2010	1:24:10 AM	PH3 valve closed
7/9/2010	1:24:10 AM	SiCl4 pre valve closed
7/9/2010	1:24:10 AM	SiCl4 post valve closed
7/9/2010	1:24:10 AM	Bubbler valve closed
7/9/2010	1:24:10 AM	Main Vac valve opened
7/9/2010	1:24:10 AM	Bypass valve opened
7/9/2010	1:24:10 AM	Helium MFC set to  0.000000
7/9/2010	1:24:10 AM	H2 MFC set to  0.000000
7/9/2010	1:24:10 AM	BCl3 MFC set to  0.000000
7/9/2010	1:24:10 AM	PHl3 MFC set to  0.000000
7/9/2010	1:24:10 AM	SiCl4 MFC set to  0.000000
7/9/2010	1:24:10 AM	Bypass solenoid MFC set to  0.000000
7/9/2010	1:24:11 AM	Tube furnace set to 0
7/9/2010	1:25:11 AM	H2 valve closed
7/9/2010	1:25:11 AM	BCl3 valve closed
7/9/2010	1:25:11 AM	PH3 valve closed
7/9/2010	1:25:11 AM	SiCl4 pre valve closed
7/9/2010	1:25:11 AM	SiCl4 post valve closed
7/9/2010	1:25:11 AM	Bubbler valve closed
7/9/2010	1:25:11 AM	Helium valve opened
7/9/2010	1:25:11 AM	Main Vac valve opened
7/9/2010	1:25:11 AM	Bypass valve opened
7/9/2010	1:25:11 AM	Helium MFC set to  100.000000
7/9/2010	1:25:11 AM	H2 MFC set to  0.000000
7/9/2010	1:25:11 AM	BCl3 MFC set to  0.000000
7/9/2010	1:25:11 AM	PHl3 MFC set to  0.000000
7/9/2010	1:25:11 AM	SiCl4 MFC set to  0.000000
7/9/2010	1:25:11 AM	Bypass solenoid MFC set to  0.000000
7/9/2010	1:25:11 AM	Tube furnace set to 0
7/9/2010	1:34:11 AM	Helium valve closed
7/9/2010	1:34:11 AM	H2 valve closed
7/9/2010	1:34:11 AM	BCl3 valve closed
7/9/2010	1:34:11 AM	PH3 valve closed
7/9/2010	1:34:11 AM	SiCl4 pre valve closed
7/9/2010	1:34:11 AM	SiCl4 post valve closed
7/9/2010	1:34:11 AM	Bubbler valve closed
7/9/2010	1:34:11 AM	Main Vac valve opened
7/9/2010	1:34:11 AM	Bypass valve opened
7/9/2010	1:34:11 AM	Helium MFC set to  0.000000
7/9/2010	1:34:11 AM	H2 MFC set to  0.000000
7/9/2010	1:34:11 AM	BCl3 MFC set to  0.000000
7/9/2010	1:34:11 AM	PHl3 MFC set to  0.000000
7/9/2010	1:34:11 AM	SiCl4 MFC set to  0.000000
7/9/2010	1:34:11 AM	Bypass solenoid MFC set to  0.000000
7/9/2010	1:34:11 AM	Tube furnace set to 0
7/9/2010	1:35:11 AM	H2 valve closed
7/9/2010	1:35:11 AM	BCl3 valve closed
7/9/2010	1:35:11 AM	PH3 valve closed
7/9/2010	1:35:11 AM	SiCl4 pre valve closed
7/9/2010	1:35:11 AM	SiCl4 post valve closed
7/9/2010	1:35:11 AM	Bubbler valve closed
7/9/2010	1:35:11 AM	Helium valve opened
7/9/2010	1:35:11 AM	Main Vac valve opened
7/9/2010	1:35:11 AM	Bypass valve opened
7/9/2010	1:35:11 AM	Helium MFC set to  100.000000
7/9/2010	1:35:11 AM	H2 MFC set to  0.000000
7/9/2010	1:35:11 AM	BCl3 MFC set to  0.000000
7/9/2010	1:35:11 AM	PHl3 MFC set to  0.000000
7/9/2010	1:35:11 AM	SiCl4 MFC set to  0.000000
7/9/2010	1:35:11 AM	Bypass solenoid MFC set to  0.000000
7/9/2010	1:35:11 AM	Tube furnace set to 0
7/9/2010	1:44:11 AM	Helium valve closed
7/9/2010	1:44:11 AM	H2 valve closed
7/9/2010	1:44:11 AM	BCl3 valve closed
7/9/2010	1:44:11 AM	PH3 valve closed
7/9/2010	1:44:11 AM	SiCl4 pre valve closed
7/9/2010	1:44:11 AM	SiCl4 post valve closed
7/9/2010	1:44:11 AM	Bubbler valve closed
7/9/2010	1:44:11 AM	Main Vac valve opened
7/9/2010	1:44:11 AM	Bypass valve opened
7/9/2010	1:44:11 AM	Helium MFC set to  0.000000
7/9/2010	1:44:11 AM	H2 MFC set to  0.000000
7/9/2010	1:44:11 AM	BCl3 MFC set to  0.000000
7/9/2010	1:44:11 AM	PHl3 MFC set to  0.000000
7/9/2010	1:44:11 AM	SiCl4 MFC set to  0.000000
7/9/2010	1:44:11 AM	Bypass solenoid MFC set to  0.000000
7/9/2010	1:44:11 AM	Tube furnace set to 0
7/9/2010	1:44:12 AM	Run finished at 1:44 AM
7/9/2010	1:44:12 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/9/2010	8:36:21 AM	Recipe started at 8:36 AM
7/9/2010	8:36:21 AM	Helium valve closed
7/9/2010	8:36:21 AM	BCl3 valve closed
7/9/2010	8:36:21 AM	PH3 valve closed
7/9/2010	8:36:21 AM	SiCl4 pre valve closed
7/9/2010	8:36:21 AM	SiCl4 post valve closed
7/9/2010	8:36:21 AM	Main Vac valve closed
7/9/2010	8:36:21 AM	Bypass valve closed
7/9/2010	8:36:21 AM	Bubbler valve closed
7/9/2010	8:36:21 AM	H2 valve opened
7/9/2010	8:36:21 AM	Helium MFC set to  0.000000
7/9/2010	8:36:21 AM	H2 MFC set to  500.000000
7/9/2010	8:36:21 AM	BCl3 MFC set to  0.000000
7/9/2010	8:36:21 AM	PHl3 MFC set to  0.000000
7/9/2010	8:36:21 AM	SiCl4 MFC set to  0.000000
7/9/2010	8:36:21 AM	Bypass solenoid MFC set to  0.000000
7/9/2010	8:36:21 AM	Tube furnace set to 1000
7/9/2010	8:37:43 AM	Helium valve closed
7/9/2010	8:37:43 AM	BCl3 valve closed
7/9/2010	8:37:43 AM	PH3 valve closed
7/9/2010	8:37:43 AM	SiCl4 pre valve closed
7/9/2010	8:37:43 AM	SiCl4 post valve closed
7/9/2010	8:37:43 AM	Main Vac valve closed
7/9/2010	8:37:43 AM	Bypass valve closed
7/9/2010	8:37:43 AM	H2 valve opened
7/9/2010	8:37:43 AM	Bubbler valve opened
7/9/2010	8:37:43 AM	Helium MFC set to  0.000000
7/9/2010	8:37:43 AM	H2 MFC set to  500.000000
7/9/2010	8:37:43 AM	BCl3 MFC set to  0.000000
7/9/2010	8:37:43 AM	PHl3 MFC set to  0.000000
7/9/2010	8:37:43 AM	SiCl4 MFC set to  0.000000
7/9/2010	8:37:43 AM	Bypass solenoid MFC set to  0.000000
7/9/2010	8:37:43 AM	Tube furnace set to 1000
7/9/2010	8:57:43 AM	Helium valve closed
7/9/2010	8:57:43 AM	BCl3 valve closed
7/9/2010	8:57:43 AM	PH3 valve closed
7/9/2010	8:57:43 AM	Main Vac valve closed
7/9/2010	8:57:43 AM	Bypass valve closed
7/9/2010	8:57:43 AM	H2 valve opened
7/9/2010	8:57:43 AM	SiCl4 pre valve opened
7/9/2010	8:57:43 AM	SiCl4 post valve opened
7/9/2010	8:57:43 AM	Bubbler valve opened
7/9/2010	8:57:43 AM	Helium MFC set to  0.000000
7/9/2010	8:57:43 AM	H2 MFC set to  500.000000
7/9/2010	8:57:43 AM	BCl3 MFC set to  0.000000
7/9/2010	8:57:43 AM	PHl3 MFC set to  0.000000
7/9/2010	8:57:43 AM	SiCl4 MFC set to  40.000000
7/9/2010	8:57:43 AM	Bypass solenoid MFC set to  0.000000
7/9/2010	8:57:43 AM	Tube furnace set to 1000
7/9/2010	9:12:43 AM	Helium valve closed
7/9/2010	9:12:43 AM	BCl3 valve closed
7/9/2010	9:12:43 AM	PH3 valve closed
7/9/2010	9:12:43 AM	SiCl4 pre valve closed
7/9/2010	9:12:43 AM	SiCl4 post valve closed
7/9/2010	9:12:43 AM	Main Vac valve closed
7/9/2010	9:12:43 AM	Bypass valve closed
7/9/2010	9:12:43 AM	H2 valve opened
7/9/2010	9:12:43 AM	Bubbler valve opened
7/9/2010	9:12:43 AM	Helium MFC set to  0.000000
7/9/2010	9:12:43 AM	H2 MFC set to  500.000000
7/9/2010	9:12:43 AM	BCl3 MFC set to  0.000000
7/9/2010	9:12:43 AM	PHl3 MFC set to  0.000000
7/9/2010	9:12:43 AM	SiCl4 MFC set to  0.000000
7/9/2010	9:12:43 AM	Bypass solenoid MFC set to  0.000000
7/9/2010	9:12:43 AM	Tube furnace set to 750
7/9/2010	9:32:43 AM	H2 valve closed
7/9/2010	9:32:43 AM	BCl3 valve closed
7/9/2010	9:32:43 AM	PH3 valve closed
7/9/2010	9:32:43 AM	SiCl4 pre valve closed
7/9/2010	9:32:43 AM	SiCl4 post valve closed
7/9/2010	9:32:43 AM	Main Vac valve closed
7/9/2010	9:32:43 AM	Bypass valve closed
7/9/2010	9:32:43 AM	Helium valve opened
7/9/2010	9:32:43 AM	Bubbler valve opened
7/9/2010	9:32:43 AM	Helium MFC set to  500.000000
7/9/2010	9:32:43 AM	H2 MFC set to  0.000000
7/9/2010	9:32:43 AM	BCl3 MFC set to  0.000000
7/9/2010	9:32:43 AM	PHl3 MFC set to  0.000000
7/9/2010	9:32:43 AM	SiCl4 MFC set to  0.000000
7/9/2010	9:32:43 AM	Bypass solenoid MFC set to  0.000000
7/9/2010	9:32:43 AM	Tube furnace set to 0
7/9/2010	9:52:43 AM	Helium valve closed
7/9/2010	9:52:43 AM	H2 valve closed
7/9/2010	9:52:43 AM	BCl3 valve closed
7/9/2010	9:52:43 AM	PH3 valve closed
7/9/2010	9:52:43 AM	SiCl4 pre valve closed
7/9/2010	9:52:43 AM	SiCl4 post valve closed
7/9/2010	9:52:43 AM	Main Vac valve closed
7/9/2010	9:52:43 AM	Bypass valve closed
7/9/2010	9:52:43 AM	Bubbler valve closed
7/9/2010	9:52:43 AM	Helium MFC set to  0.000000
7/9/2010	9:52:43 AM	H2 MFC set to  0.000000
7/9/2010	9:52:43 AM	BCl3 MFC set to  0.000000
7/9/2010	9:52:43 AM	PHl3 MFC set to  0.000000
7/9/2010	9:52:43 AM	SiCl4 MFC set to  0.000000
7/9/2010	9:52:43 AM	Bypass solenoid MFC set to  0.000000
7/9/2010	9:52:43 AM	Tube furnace set to 0
7/9/2010	9:52:44 AM	Run finished at 9:52 AM
7/9/2010	10:16:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/9/2010	10:16:57 AM	Recipe started at 10:16 AM
7/9/2010	10:16:57 AM	Helium valve closed
7/9/2010	10:16:57 AM	H2 valve closed
7/9/2010	10:16:57 AM	BCl3 valve closed
7/9/2010	10:16:57 AM	PH3 valve closed
7/9/2010	10:16:57 AM	SiCl4 pre valve closed
7/9/2010	10:16:57 AM	SiCl4 post valve closed
7/9/2010	10:16:57 AM	Main Vac valve closed
7/9/2010	10:16:57 AM	Bubbler valve closed
7/9/2010	10:16:57 AM	Bypass valve opened
7/9/2010	10:16:57 AM	Helium MFC set to  0.000000
7/9/2010	10:16:57 AM	H2 MFC set to  0.000000
7/9/2010	10:16:57 AM	BCl3 MFC set to  0.000000
7/9/2010	10:16:57 AM	PHl3 MFC set to  0.000000
7/9/2010	10:16:57 AM	SiCl4 MFC set to  0.000000
7/9/2010	10:16:57 AM	Bypass solenoid MFC set to  0.000000
7/9/2010	10:16:57 AM	Tube furnace set to 0
7/9/2010	10:17:46 AM	Helium valve closed
7/9/2010	10:17:46 AM	H2 valve closed
7/9/2010	10:17:46 AM	BCl3 valve closed
7/9/2010	10:17:46 AM	PH3 valve closed
7/9/2010	10:17:46 AM	SiCl4 pre valve closed
7/9/2010	10:17:46 AM	SiCl4 post valve closed
7/9/2010	10:17:46 AM	Bubbler valve closed
7/9/2010	10:17:46 AM	Main Vac valve opened
7/9/2010	10:17:46 AM	Bypass valve opened
7/9/2010	10:17:46 AM	Helium MFC set to  0.000000
7/9/2010	10:17:46 AM	H2 MFC set to  0.000000
7/9/2010	10:17:46 AM	BCl3 MFC set to  0.000000
7/9/2010	10:17:46 AM	PHl3 MFC set to  0.000000
7/9/2010	10:17:46 AM	SiCl4 MFC set to  0.000000
7/9/2010	10:17:46 AM	Bypass solenoid MFC set to  0.000000
7/9/2010	10:17:46 AM	Tube furnace set to 0
7/9/2010	10:17:46 AM	Run finished at 10:17 AM
7/9/2010	10:17:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/9/2010	10:19:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/9/2010	10:19:57 AM	Recipe started at 10:19 AM
7/9/2010	10:19:57 AM	Helium valve closed
7/9/2010	10:19:57 AM	H2 valve closed
7/9/2010	10:19:57 AM	BCl3 valve closed
7/9/2010	10:19:57 AM	PH3 valve closed
7/9/2010	10:19:57 AM	SiCl4 pre valve closed
7/9/2010	10:19:57 AM	SiCl4 post valve closed
7/9/2010	10:19:57 AM	Main Vac valve closed
7/9/2010	10:19:57 AM	Bubbler valve closed
7/9/2010	10:19:57 AM	Bypass valve opened
7/9/2010	10:19:57 AM	Helium MFC set to  0.000000
7/9/2010	10:19:57 AM	H2 MFC set to  0.000000
7/9/2010	10:19:57 AM	BCl3 MFC set to  0.000000
7/9/2010	10:19:57 AM	PHl3 MFC set to  0.000000
7/9/2010	10:19:57 AM	SiCl4 MFC set to  0.000000
7/9/2010	10:19:57 AM	Bypass solenoid MFC set to  0.000000
7/9/2010	10:19:57 AM	Tube furnace set to 0
7/9/2010	10:19:57 AM	Helium valve closed
7/9/2010	10:19:57 AM	H2 valve closed
7/9/2010	10:19:57 AM	BCl3 valve closed
7/9/2010	10:19:57 AM	PH3 valve closed
7/9/2010	10:19:57 AM	SiCl4 pre valve closed
7/9/2010	10:19:57 AM	SiCl4 post valve closed
7/9/2010	10:19:57 AM	Bubbler valve closed
7/9/2010	10:19:57 AM	Main Vac valve opened
7/9/2010	10:19:57 AM	Bypass valve opened
7/9/2010	10:19:57 AM	Helium MFC set to  0.000000
7/9/2010	10:19:57 AM	H2 MFC set to  0.000000
7/9/2010	10:19:57 AM	BCl3 MFC set to  0.000000
7/9/2010	10:19:57 AM	PHl3 MFC set to  0.000000
7/9/2010	10:19:57 AM	SiCl4 MFC set to  0.000000
7/9/2010	10:19:57 AM	Bypass solenoid MFC set to  0.000000
7/9/2010	10:19:58 AM	Tube furnace set to 0
7/9/2010	10:20:58 AM	H2 valve closed
7/9/2010	10:20:58 AM	BCl3 valve closed
7/9/2010	10:20:58 AM	PH3 valve closed
7/9/2010	10:20:58 AM	SiCl4 pre valve closed
7/9/2010	10:20:58 AM	SiCl4 post valve closed
7/9/2010	10:20:58 AM	Bubbler valve closed
7/9/2010	10:20:58 AM	Helium valve opened
7/9/2010	10:20:58 AM	Main Vac valve opened
7/9/2010	10:20:58 AM	Bypass valve opened
7/9/2010	10:20:58 AM	Helium MFC set to  100.000000
7/9/2010	10:20:58 AM	H2 MFC set to  0.000000
7/9/2010	10:20:58 AM	BCl3 MFC set to  0.000000
7/9/2010	10:20:58 AM	PHl3 MFC set to  0.000000
7/9/2010	10:20:58 AM	SiCl4 MFC set to  0.000000
7/9/2010	10:20:58 AM	Bypass solenoid MFC set to  0.000000
7/9/2010	10:20:58 AM	Tube furnace set to 0
7/9/2010	10:29:58 AM	Helium valve closed
7/9/2010	10:29:58 AM	H2 valve closed
7/9/2010	10:29:58 AM	BCl3 valve closed
7/9/2010	10:29:58 AM	PH3 valve closed
7/9/2010	10:29:58 AM	SiCl4 pre valve closed
7/9/2010	10:29:58 AM	SiCl4 post valve closed
7/9/2010	10:29:58 AM	Bubbler valve closed
7/9/2010	10:29:58 AM	Main Vac valve opened
7/9/2010	10:29:58 AM	Bypass valve opened
7/9/2010	10:29:58 AM	Helium MFC set to  0.000000
7/9/2010	10:29:58 AM	H2 MFC set to  0.000000
7/9/2010	10:29:58 AM	BCl3 MFC set to  0.000000
7/9/2010	10:29:58 AM	PHl3 MFC set to  0.000000
7/9/2010	10:29:58 AM	SiCl4 MFC set to  0.000000
7/9/2010	10:29:58 AM	Bypass solenoid MFC set to  0.000000
7/9/2010	10:29:58 AM	Tube furnace set to 0
7/9/2010	10:30:58 AM	H2 valve closed
7/9/2010	10:30:58 AM	BCl3 valve closed
7/9/2010	10:30:58 AM	PH3 valve closed
7/9/2010	10:30:58 AM	SiCl4 pre valve closed
7/9/2010	10:30:58 AM	SiCl4 post valve closed
7/9/2010	10:30:58 AM	Bubbler valve closed
7/9/2010	10:30:58 AM	Helium valve opened
7/9/2010	10:30:58 AM	Main Vac valve opened
7/9/2010	10:30:58 AM	Bypass valve opened
7/9/2010	10:30:58 AM	Helium MFC set to  100.000000
7/9/2010	10:30:58 AM	H2 MFC set to  0.000000
7/9/2010	10:30:58 AM	BCl3 MFC set to  0.000000
7/9/2010	10:30:58 AM	PHl3 MFC set to  0.000000
7/9/2010	10:30:58 AM	SiCl4 MFC set to  0.000000
7/9/2010	10:30:58 AM	Bypass solenoid MFC set to  0.000000
7/9/2010	10:30:58 AM	Tube furnace set to 0
7/9/2010	10:39:58 AM	Helium valve closed
7/9/2010	10:39:58 AM	H2 valve closed
7/9/2010	10:39:58 AM	BCl3 valve closed
7/9/2010	10:39:58 AM	PH3 valve closed
7/9/2010	10:39:58 AM	SiCl4 pre valve closed
7/9/2010	10:39:58 AM	SiCl4 post valve closed
7/9/2010	10:39:58 AM	Bubbler valve closed
7/9/2010	10:39:58 AM	Main Vac valve opened
7/9/2010	10:39:58 AM	Bypass valve opened
7/9/2010	10:39:58 AM	Helium MFC set to  0.000000
7/9/2010	10:39:58 AM	H2 MFC set to  0.000000
7/9/2010	10:39:58 AM	BCl3 MFC set to  0.000000
7/9/2010	10:39:58 AM	PHl3 MFC set to  0.000000
7/9/2010	10:39:58 AM	SiCl4 MFC set to  0.000000
7/9/2010	10:39:58 AM	Bypass solenoid MFC set to  0.000000
7/9/2010	10:39:58 AM	Tube furnace set to 0
7/9/2010	10:40:58 AM	H2 valve closed
7/9/2010	10:40:58 AM	BCl3 valve closed
7/9/2010	10:40:58 AM	PH3 valve closed
7/9/2010	10:40:58 AM	SiCl4 pre valve closed
7/9/2010	10:40:58 AM	SiCl4 post valve closed
7/9/2010	10:40:58 AM	Bubbler valve closed
7/9/2010	10:40:58 AM	Helium valve opened
7/9/2010	10:40:58 AM	Main Vac valve opened
7/9/2010	10:40:58 AM	Bypass valve opened
7/9/2010	10:40:58 AM	Helium MFC set to  100.000000
7/9/2010	10:40:58 AM	H2 MFC set to  0.000000
7/9/2010	10:40:58 AM	BCl3 MFC set to  0.000000
7/9/2010	10:40:58 AM	PHl3 MFC set to  0.000000
7/9/2010	10:40:58 AM	SiCl4 MFC set to  0.000000
7/9/2010	10:40:58 AM	Bypass solenoid MFC set to  0.000000
7/9/2010	10:40:59 AM	Tube furnace set to 0
7/9/2010	10:49:49 AM	Helium valve closed
7/9/2010	10:49:49 AM	H2 valve closed
7/9/2010	10:49:49 AM	BCl3 valve closed
7/9/2010	10:49:49 AM	PH3 valve closed
7/9/2010	10:49:49 AM	SiCl4 pre valve closed
7/9/2010	10:49:49 AM	SiCl4 post valve closed
7/9/2010	10:49:49 AM	Bubbler valve closed
7/9/2010	10:49:49 AM	Main Vac valve opened
7/9/2010	10:49:49 AM	Bypass valve opened
7/9/2010	10:49:49 AM	Helium MFC set to  0.000000
7/9/2010	10:49:49 AM	H2 MFC set to  0.000000
7/9/2010	10:49:49 AM	BCl3 MFC set to  0.000000
7/9/2010	10:49:49 AM	PHl3 MFC set to  0.000000
7/9/2010	10:49:49 AM	SiCl4 MFC set to  0.000000
7/9/2010	10:49:49 AM	Bypass solenoid MFC set to  0.000000
7/9/2010	10:49:49 AM	Tube furnace set to 0
7/9/2010	10:49:50 AM	Run finished at 10:49 AM
7/9/2010	10:49:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/9/2010	10:52:05 AM	Recipe started at 10:52 AM
7/9/2010	10:52:05 AM	Helium valve closed
7/9/2010	10:52:05 AM	BCl3 valve closed
7/9/2010	10:52:05 AM	PH3 valve closed
7/9/2010	10:52:05 AM	SiCl4 pre valve closed
7/9/2010	10:52:05 AM	SiCl4 post valve closed
7/9/2010	10:52:05 AM	Main Vac valve closed
7/9/2010	10:52:05 AM	Bypass valve closed
7/9/2010	10:52:05 AM	Bubbler valve closed
7/9/2010	10:52:05 AM	H2 valve opened
7/9/2010	10:52:05 AM	Helium MFC set to  0.000000
7/9/2010	10:52:05 AM	H2 MFC set to  500.000000
7/9/2010	10:52:05 AM	BCl3 MFC set to  0.000000
7/9/2010	10:52:05 AM	PHl3 MFC set to  0.000000
7/9/2010	10:52:05 AM	SiCl4 MFC set to  0.000000
7/9/2010	10:52:05 AM	Bypass solenoid MFC set to  0.000000
7/9/2010	10:52:06 AM	Tube furnace set to 1000
7/9/2010	10:53:23 AM	Helium valve closed
7/9/2010	10:53:23 AM	BCl3 valve closed
7/9/2010	10:53:23 AM	PH3 valve closed
7/9/2010	10:53:23 AM	SiCl4 pre valve closed
7/9/2010	10:53:23 AM	SiCl4 post valve closed
7/9/2010	10:53:23 AM	Main Vac valve closed
7/9/2010	10:53:23 AM	Bypass valve closed
7/9/2010	10:53:23 AM	H2 valve opened
7/9/2010	10:53:23 AM	Bubbler valve opened
7/9/2010	10:53:23 AM	Helium MFC set to  0.000000
7/9/2010	10:53:23 AM	H2 MFC set to  500.000000
7/9/2010	10:53:23 AM	BCl3 MFC set to  0.000000
7/9/2010	10:53:23 AM	PHl3 MFC set to  0.000000
7/9/2010	10:53:23 AM	SiCl4 MFC set to  0.000000
7/9/2010	10:53:23 AM	Bypass solenoid MFC set to  0.000000
7/9/2010	10:53:24 AM	Tube furnace set to 1000
7/9/2010	11:13:23 AM	Helium valve closed
7/9/2010	11:13:23 AM	BCl3 valve closed
7/9/2010	11:13:23 AM	PH3 valve closed
7/9/2010	11:13:23 AM	Main Vac valve closed
7/9/2010	11:13:23 AM	Bypass valve closed
7/9/2010	11:13:23 AM	H2 valve opened
7/9/2010	11:13:23 AM	SiCl4 pre valve opened
7/9/2010	11:13:23 AM	SiCl4 post valve opened
7/9/2010	11:13:23 AM	Bubbler valve opened
7/9/2010	11:13:23 AM	Helium MFC set to  0.000000
7/9/2010	11:13:24 AM	H2 MFC set to  500.000000
7/9/2010	11:13:24 AM	BCl3 MFC set to  0.000000
7/9/2010	11:13:24 AM	PHl3 MFC set to  0.000000
7/9/2010	11:13:24 AM	SiCl4 MFC set to  37.000000
7/9/2010	11:13:24 AM	Bypass solenoid MFC set to  0.000000
7/9/2010	11:13:24 AM	Tube furnace set to 1000
7/9/2010	11:28:24 AM	Helium valve closed
7/9/2010	11:28:24 AM	BCl3 valve closed
7/9/2010	11:28:24 AM	PH3 valve closed
7/9/2010	11:28:24 AM	SiCl4 pre valve closed
7/9/2010	11:28:24 AM	SiCl4 post valve closed
7/9/2010	11:28:24 AM	Main Vac valve closed
7/9/2010	11:28:24 AM	Bypass valve closed
7/9/2010	11:28:24 AM	H2 valve opened
7/9/2010	11:28:24 AM	Bubbler valve opened
7/9/2010	11:28:24 AM	Helium MFC set to  0.000000
7/9/2010	11:28:24 AM	H2 MFC set to  500.000000
7/9/2010	11:28:24 AM	BCl3 MFC set to  0.000000
7/9/2010	11:28:24 AM	PHl3 MFC set to  0.000000
7/9/2010	11:28:24 AM	SiCl4 MFC set to  0.000000
7/9/2010	11:28:24 AM	Bypass solenoid MFC set to  0.000000
7/9/2010	11:28:24 AM	Tube furnace set to 750
7/9/2010	11:48:24 AM	H2 valve closed
7/9/2010	11:48:24 AM	BCl3 valve closed
7/9/2010	11:48:24 AM	PH3 valve closed
7/9/2010	11:48:24 AM	SiCl4 pre valve closed
7/9/2010	11:48:24 AM	SiCl4 post valve closed
7/9/2010	11:48:24 AM	Main Vac valve closed
7/9/2010	11:48:24 AM	Bypass valve closed
7/9/2010	11:48:24 AM	Helium valve opened
7/9/2010	11:48:24 AM	Bubbler valve opened
7/9/2010	11:48:24 AM	Helium MFC set to  500.000000
7/9/2010	11:48:24 AM	H2 MFC set to  0.000000
7/9/2010	11:48:24 AM	BCl3 MFC set to  0.000000
7/9/2010	11:48:24 AM	PHl3 MFC set to  0.000000
7/9/2010	11:48:24 AM	SiCl4 MFC set to  0.000000
7/9/2010	11:48:24 AM	Bypass solenoid MFC set to  0.000000
7/9/2010	11:48:24 AM	Tube furnace set to 0
7/9/2010	12:08:24 PM	Helium valve closed
7/9/2010	12:08:24 PM	H2 valve closed
7/9/2010	12:08:24 PM	BCl3 valve closed
7/9/2010	12:08:24 PM	PH3 valve closed
7/9/2010	12:08:24 PM	SiCl4 pre valve closed
7/9/2010	12:08:24 PM	SiCl4 post valve closed
7/9/2010	12:08:24 PM	Main Vac valve closed
7/9/2010	12:08:24 PM	Bypass valve closed
7/9/2010	12:08:24 PM	Bubbler valve closed
7/9/2010	12:08:24 PM	Helium MFC set to  0.000000
7/9/2010	12:08:24 PM	H2 MFC set to  0.000000
7/9/2010	12:08:24 PM	BCl3 MFC set to  0.000000
7/9/2010	12:08:24 PM	PHl3 MFC set to  0.000000
7/9/2010	12:08:24 PM	SiCl4 MFC set to  0.000000
7/9/2010	12:08:24 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	12:08:24 PM	Tube furnace set to 0
7/9/2010	12:08:24 PM	Run finished at 12:08 PM
7/9/2010	12:11:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/9/2010	12:11:35 PM	Recipe started at 12:11 PM
7/9/2010	12:11:35 PM	Helium valve closed
7/9/2010	12:11:35 PM	H2 valve closed
7/9/2010	12:11:35 PM	BCl3 valve closed
7/9/2010	12:11:35 PM	PH3 valve closed
7/9/2010	12:11:35 PM	SiCl4 pre valve closed
7/9/2010	12:11:35 PM	SiCl4 post valve closed
7/9/2010	12:11:35 PM	Main Vac valve closed
7/9/2010	12:11:35 PM	Bubbler valve closed
7/9/2010	12:11:35 PM	Bypass valve opened
7/9/2010	12:11:35 PM	Helium MFC set to  0.000000
7/9/2010	12:11:35 PM	H2 MFC set to  0.000000
7/9/2010	12:11:35 PM	BCl3 MFC set to  0.000000
7/9/2010	12:11:35 PM	PHl3 MFC set to  0.000000
7/9/2010	12:11:35 PM	SiCl4 MFC set to  0.000000
7/9/2010	12:11:35 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	12:11:36 PM	Tube furnace set to 0
7/9/2010	12:12:25 PM	Helium valve closed
7/9/2010	12:12:25 PM	H2 valve closed
7/9/2010	12:12:25 PM	BCl3 valve closed
7/9/2010	12:12:25 PM	PH3 valve closed
7/9/2010	12:12:25 PM	SiCl4 pre valve closed
7/9/2010	12:12:25 PM	SiCl4 post valve closed
7/9/2010	12:12:25 PM	Bubbler valve closed
7/9/2010	12:12:25 PM	Main Vac valve opened
7/9/2010	12:12:25 PM	Bypass valve opened
7/9/2010	12:12:25 PM	Helium MFC set to  0.000000
7/9/2010	12:12:25 PM	H2 MFC set to  0.000000
7/9/2010	12:12:25 PM	BCl3 MFC set to  0.000000
7/9/2010	12:12:25 PM	PHl3 MFC set to  0.000000
7/9/2010	12:12:25 PM	SiCl4 MFC set to  0.000000
7/9/2010	12:12:25 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	12:12:25 PM	Tube furnace set to 0
7/9/2010	12:12:25 PM	Run finished at 12:12 PM
7/9/2010	12:12:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/9/2010	12:13:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/9/2010	12:13:55 PM	Recipe started at 12:13 PM
7/9/2010	12:13:55 PM	Helium valve closed
7/9/2010	12:13:55 PM	H2 valve closed
7/9/2010	12:13:55 PM	BCl3 valve closed
7/9/2010	12:13:55 PM	PH3 valve closed
7/9/2010	12:13:55 PM	SiCl4 pre valve closed
7/9/2010	12:13:55 PM	SiCl4 post valve closed
7/9/2010	12:13:55 PM	Main Vac valve closed
7/9/2010	12:13:55 PM	Bubbler valve closed
7/9/2010	12:13:55 PM	Bypass valve opened
7/9/2010	12:13:55 PM	Helium MFC set to  0.000000
7/9/2010	12:13:55 PM	H2 MFC set to  0.000000
7/9/2010	12:13:55 PM	BCl3 MFC set to  0.000000
7/9/2010	12:13:55 PM	PHl3 MFC set to  0.000000
7/9/2010	12:13:55 PM	SiCl4 MFC set to  0.000000
7/9/2010	12:13:55 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	12:13:55 PM	Tube furnace set to 0
7/9/2010	12:13:56 PM	Helium valve closed
7/9/2010	12:13:56 PM	H2 valve closed
7/9/2010	12:13:56 PM	BCl3 valve closed
7/9/2010	12:13:56 PM	PH3 valve closed
7/9/2010	12:13:56 PM	SiCl4 pre valve closed
7/9/2010	12:13:56 PM	SiCl4 post valve closed
7/9/2010	12:13:56 PM	Bubbler valve closed
7/9/2010	12:13:56 PM	Main Vac valve opened
7/9/2010	12:13:56 PM	Bypass valve opened
7/9/2010	12:13:56 PM	Helium MFC set to  0.000000
7/9/2010	12:13:56 PM	H2 MFC set to  0.000000
7/9/2010	12:13:56 PM	BCl3 MFC set to  0.000000
7/9/2010	12:13:56 PM	PHl3 MFC set to  0.000000
7/9/2010	12:13:56 PM	SiCl4 MFC set to  0.000000
7/9/2010	12:13:56 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	12:13:56 PM	Tube furnace set to 0
7/9/2010	12:14:56 PM	H2 valve closed
7/9/2010	12:14:56 PM	BCl3 valve closed
7/9/2010	12:14:56 PM	PH3 valve closed
7/9/2010	12:14:56 PM	SiCl4 pre valve closed
7/9/2010	12:14:56 PM	SiCl4 post valve closed
7/9/2010	12:14:56 PM	Bubbler valve closed
7/9/2010	12:14:56 PM	Helium valve opened
7/9/2010	12:14:56 PM	Main Vac valve opened
7/9/2010	12:14:56 PM	Bypass valve opened
7/9/2010	12:14:56 PM	Helium MFC set to  100.000000
7/9/2010	12:14:56 PM	H2 MFC set to  0.000000
7/9/2010	12:14:56 PM	BCl3 MFC set to  0.000000
7/9/2010	12:14:56 PM	PHl3 MFC set to  0.000000
7/9/2010	12:14:56 PM	SiCl4 MFC set to  0.000000
7/9/2010	12:14:56 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	12:14:56 PM	Tube furnace set to 0
7/9/2010	12:23:56 PM	Helium valve closed
7/9/2010	12:23:56 PM	H2 valve closed
7/9/2010	12:23:56 PM	BCl3 valve closed
7/9/2010	12:23:56 PM	PH3 valve closed
7/9/2010	12:23:56 PM	SiCl4 pre valve closed
7/9/2010	12:23:56 PM	SiCl4 post valve closed
7/9/2010	12:23:56 PM	Bubbler valve closed
7/9/2010	12:23:56 PM	Main Vac valve opened
7/9/2010	12:23:56 PM	Bypass valve opened
7/9/2010	12:23:56 PM	Helium MFC set to  0.000000
7/9/2010	12:23:56 PM	H2 MFC set to  0.000000
7/9/2010	12:23:56 PM	BCl3 MFC set to  0.000000
7/9/2010	12:23:56 PM	PHl3 MFC set to  0.000000
7/9/2010	12:23:56 PM	SiCl4 MFC set to  0.000000
7/9/2010	12:23:56 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	12:23:56 PM	Tube furnace set to 0
7/9/2010	12:24:56 PM	H2 valve closed
7/9/2010	12:24:56 PM	BCl3 valve closed
7/9/2010	12:24:56 PM	PH3 valve closed
7/9/2010	12:24:56 PM	SiCl4 pre valve closed
7/9/2010	12:24:56 PM	SiCl4 post valve closed
7/9/2010	12:24:56 PM	Bubbler valve closed
7/9/2010	12:24:56 PM	Helium valve opened
7/9/2010	12:24:56 PM	Main Vac valve opened
7/9/2010	12:24:56 PM	Bypass valve opened
7/9/2010	12:24:56 PM	Helium MFC set to  100.000000
7/9/2010	12:24:56 PM	H2 MFC set to  0.000000
7/9/2010	12:24:56 PM	BCl3 MFC set to  0.000000
7/9/2010	12:24:56 PM	PHl3 MFC set to  0.000000
7/9/2010	12:24:56 PM	SiCl4 MFC set to  0.000000
7/9/2010	12:24:56 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	12:24:56 PM	Tube furnace set to 0
7/9/2010	12:33:56 PM	Helium valve closed
7/9/2010	12:33:56 PM	H2 valve closed
7/9/2010	12:33:56 PM	BCl3 valve closed
7/9/2010	12:33:56 PM	PH3 valve closed
7/9/2010	12:33:56 PM	SiCl4 pre valve closed
7/9/2010	12:33:56 PM	SiCl4 post valve closed
7/9/2010	12:33:56 PM	Bubbler valve closed
7/9/2010	12:33:56 PM	Main Vac valve opened
7/9/2010	12:33:56 PM	Bypass valve opened
7/9/2010	12:33:56 PM	Helium MFC set to  0.000000
7/9/2010	12:33:56 PM	H2 MFC set to  0.000000
7/9/2010	12:33:56 PM	BCl3 MFC set to  0.000000
7/9/2010	12:33:56 PM	PHl3 MFC set to  0.000000
7/9/2010	12:33:56 PM	SiCl4 MFC set to  0.000000
7/9/2010	12:33:56 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	12:33:57 PM	Tube furnace set to 0
7/9/2010	12:34:57 PM	H2 valve closed
7/9/2010	12:34:57 PM	BCl3 valve closed
7/9/2010	12:34:57 PM	PH3 valve closed
7/9/2010	12:34:57 PM	SiCl4 pre valve closed
7/9/2010	12:34:57 PM	SiCl4 post valve closed
7/9/2010	12:34:57 PM	Bubbler valve closed
7/9/2010	12:34:57 PM	Helium valve opened
7/9/2010	12:34:57 PM	Main Vac valve opened
7/9/2010	12:34:57 PM	Bypass valve opened
7/9/2010	12:34:57 PM	Helium MFC set to  100.000000
7/9/2010	12:34:57 PM	H2 MFC set to  0.000000
7/9/2010	12:34:57 PM	BCl3 MFC set to  0.000000
7/9/2010	12:34:57 PM	PHl3 MFC set to  0.000000
7/9/2010	12:34:57 PM	SiCl4 MFC set to  0.000000
7/9/2010	12:34:57 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	12:34:57 PM	Tube furnace set to 0
7/9/2010	12:43:57 PM	Helium valve closed
7/9/2010	12:43:57 PM	H2 valve closed
7/9/2010	12:43:57 PM	BCl3 valve closed
7/9/2010	12:43:57 PM	PH3 valve closed
7/9/2010	12:43:57 PM	SiCl4 pre valve closed
7/9/2010	12:43:57 PM	SiCl4 post valve closed
7/9/2010	12:43:57 PM	Bubbler valve closed
7/9/2010	12:43:57 PM	Main Vac valve opened
7/9/2010	12:43:57 PM	Bypass valve opened
7/9/2010	12:43:57 PM	Helium MFC set to  0.000000
7/9/2010	12:43:57 PM	H2 MFC set to  0.000000
7/9/2010	12:43:57 PM	BCl3 MFC set to  0.000000
7/9/2010	12:43:57 PM	PHl3 MFC set to  0.000000
7/9/2010	12:43:57 PM	SiCl4 MFC set to  0.000000
7/9/2010	12:43:57 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	12:43:57 PM	Tube furnace set to 0
7/9/2010	12:43:58 PM	Run finished at 12:43 PM
7/9/2010	12:43:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/9/2010	1:29:49 PM	Recipe started at 1:29 PM
7/9/2010	1:29:49 PM	Helium valve closed
7/9/2010	1:29:49 PM	BCl3 valve closed
7/9/2010	1:29:49 PM	PH3 valve closed
7/9/2010	1:29:49 PM	SiCl4 pre valve closed
7/9/2010	1:29:49 PM	SiCl4 post valve closed
7/9/2010	1:29:49 PM	Main Vac valve closed
7/9/2010	1:29:49 PM	Bypass valve closed
7/9/2010	1:29:49 PM	Bubbler valve closed
7/9/2010	1:29:49 PM	H2 valve opened
7/9/2010	1:29:49 PM	Helium MFC set to  0.000000
7/9/2010	1:29:49 PM	H2 MFC set to  500.000000
7/9/2010	1:29:49 PM	BCl3 MFC set to  0.000000
7/9/2010	1:29:49 PM	PHl3 MFC set to  0.000000
7/9/2010	1:29:49 PM	SiCl4 MFC set to  0.000000
7/9/2010	1:29:49 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	1:29:50 PM	Tube furnace set to 1000
7/9/2010	1:31:08 PM	Helium valve closed
7/9/2010	1:31:08 PM	BCl3 valve closed
7/9/2010	1:31:08 PM	PH3 valve closed
7/9/2010	1:31:08 PM	SiCl4 pre valve closed
7/9/2010	1:31:08 PM	SiCl4 post valve closed
7/9/2010	1:31:08 PM	Main Vac valve closed
7/9/2010	1:31:08 PM	Bypass valve closed
7/9/2010	1:31:08 PM	H2 valve opened
7/9/2010	1:31:08 PM	Bubbler valve opened
7/9/2010	1:31:08 PM	Helium MFC set to  0.000000
7/9/2010	1:31:08 PM	H2 MFC set to  500.000000
7/9/2010	1:31:08 PM	BCl3 MFC set to  0.000000
7/9/2010	1:31:08 PM	PHl3 MFC set to  0.000000
7/9/2010	1:31:08 PM	SiCl4 MFC set to  0.000000
7/9/2010	1:31:08 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	1:31:09 PM	Tube furnace set to 1000
7/9/2010	1:51:09 PM	Helium valve closed
7/9/2010	1:51:09 PM	BCl3 valve closed
7/9/2010	1:51:09 PM	PH3 valve closed
7/9/2010	1:51:09 PM	Main Vac valve closed
7/9/2010	1:51:09 PM	Bypass valve closed
7/9/2010	1:51:09 PM	H2 valve opened
7/9/2010	1:51:09 PM	SiCl4 pre valve opened
7/9/2010	1:51:09 PM	SiCl4 post valve opened
7/9/2010	1:51:09 PM	Bubbler valve opened
7/9/2010	1:51:09 PM	Helium MFC set to  0.000000
7/9/2010	1:51:09 PM	H2 MFC set to  500.000000
7/9/2010	1:51:09 PM	BCl3 MFC set to  0.000000
7/9/2010	1:51:09 PM	PHl3 MFC set to  0.000000
7/9/2010	1:51:09 PM	SiCl4 MFC set to  37.000000
7/9/2010	1:51:09 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	1:51:09 PM	Tube furnace set to 1000
7/9/2010	2:06:09 PM	Helium valve closed
7/9/2010	2:06:09 PM	BCl3 valve closed
7/9/2010	2:06:09 PM	PH3 valve closed
7/9/2010	2:06:09 PM	SiCl4 pre valve closed
7/9/2010	2:06:09 PM	SiCl4 post valve closed
7/9/2010	2:06:09 PM	Main Vac valve closed
7/9/2010	2:06:09 PM	Bypass valve closed
7/9/2010	2:06:09 PM	H2 valve opened
7/9/2010	2:06:09 PM	Bubbler valve opened
7/9/2010	2:06:09 PM	Helium MFC set to  0.000000
7/9/2010	2:06:09 PM	H2 MFC set to  500.000000
7/9/2010	2:06:09 PM	BCl3 MFC set to  0.000000
7/9/2010	2:06:09 PM	PHl3 MFC set to  0.000000
7/9/2010	2:06:09 PM	SiCl4 MFC set to  0.000000
7/9/2010	2:06:09 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	2:06:09 PM	Tube furnace set to 750
7/9/2010	2:26:09 PM	H2 valve closed
7/9/2010	2:26:09 PM	BCl3 valve closed
7/9/2010	2:26:09 PM	PH3 valve closed
7/9/2010	2:26:09 PM	SiCl4 pre valve closed
7/9/2010	2:26:09 PM	SiCl4 post valve closed
7/9/2010	2:26:09 PM	Main Vac valve closed
7/9/2010	2:26:09 PM	Bypass valve closed
7/9/2010	2:26:09 PM	Helium valve opened
7/9/2010	2:26:09 PM	Bubbler valve opened
7/9/2010	2:26:09 PM	Helium MFC set to  500.000000
7/9/2010	2:26:09 PM	H2 MFC set to  0.000000
7/9/2010	2:26:09 PM	BCl3 MFC set to  0.000000
7/9/2010	2:26:09 PM	PHl3 MFC set to  0.000000
7/9/2010	2:26:09 PM	SiCl4 MFC set to  0.000000
7/9/2010	2:26:09 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	2:26:09 PM	Tube furnace set to 0
7/9/2010	2:46:09 PM	Helium valve closed
7/9/2010	2:46:09 PM	H2 valve closed
7/9/2010	2:46:09 PM	BCl3 valve closed
7/9/2010	2:46:09 PM	PH3 valve closed
7/9/2010	2:46:09 PM	SiCl4 pre valve closed
7/9/2010	2:46:09 PM	SiCl4 post valve closed
7/9/2010	2:46:09 PM	Main Vac valve closed
7/9/2010	2:46:09 PM	Bypass valve closed
7/9/2010	2:46:09 PM	Bubbler valve closed
7/9/2010	2:46:09 PM	Helium MFC set to  0.000000
7/9/2010	2:46:09 PM	H2 MFC set to  0.000000
7/9/2010	2:46:09 PM	BCl3 MFC set to  0.000000
7/9/2010	2:46:09 PM	PHl3 MFC set to  0.000000
7/9/2010	2:46:09 PM	SiCl4 MFC set to  0.000000
7/9/2010	2:46:09 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	2:46:09 PM	Tube furnace set to 0
7/9/2010	2:46:09 PM	Run finished at 2:46 PM
7/9/2010	2:51:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/9/2010	2:51:22 PM	Recipe started at 2:51 PM
7/9/2010	2:51:23 PM	Helium valve closed
7/9/2010	2:51:23 PM	H2 valve closed
7/9/2010	2:51:23 PM	BCl3 valve closed
7/9/2010	2:51:23 PM	PH3 valve closed
7/9/2010	2:51:23 PM	SiCl4 pre valve closed
7/9/2010	2:51:23 PM	SiCl4 post valve closed
7/9/2010	2:51:23 PM	Main Vac valve closed
7/9/2010	2:51:23 PM	Bubbler valve closed
7/9/2010	2:51:23 PM	Bypass valve opened
7/9/2010	2:51:23 PM	Helium MFC set to  0.000000
7/9/2010	2:51:23 PM	H2 MFC set to  0.000000
7/9/2010	2:51:23 PM	BCl3 MFC set to  0.000000
7/9/2010	2:51:23 PM	PHl3 MFC set to  0.000000
7/9/2010	2:51:23 PM	SiCl4 MFC set to  0.000000
7/9/2010	2:51:23 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	2:51:23 PM	Tube furnace set to 0
7/9/2010	2:52:11 PM	Helium valve closed
7/9/2010	2:52:11 PM	H2 valve closed
7/9/2010	2:52:11 PM	BCl3 valve closed
7/9/2010	2:52:11 PM	PH3 valve closed
7/9/2010	2:52:11 PM	SiCl4 pre valve closed
7/9/2010	2:52:11 PM	SiCl4 post valve closed
7/9/2010	2:52:11 PM	Bubbler valve closed
7/9/2010	2:52:11 PM	Main Vac valve opened
7/9/2010	2:52:11 PM	Bypass valve opened
7/9/2010	2:52:11 PM	Helium MFC set to  0.000000
7/9/2010	2:52:11 PM	H2 MFC set to  0.000000
7/9/2010	2:52:11 PM	BCl3 MFC set to  0.000000
7/9/2010	2:52:11 PM	PHl3 MFC set to  0.000000
7/9/2010	2:52:11 PM	SiCl4 MFC set to  0.000000
7/9/2010	2:52:11 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	2:52:11 PM	Tube furnace set to 0
7/9/2010	2:52:11 PM	Run finished at 2:52 PM
7/9/2010	2:52:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/9/2010	2:53:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/9/2010	2:53:08 PM	Recipe started at 2:53 PM
7/9/2010	2:53:08 PM	Helium valve closed
7/9/2010	2:53:08 PM	H2 valve closed
7/9/2010	2:53:08 PM	BCl3 valve closed
7/9/2010	2:53:08 PM	PH3 valve closed
7/9/2010	2:53:08 PM	SiCl4 pre valve closed
7/9/2010	2:53:08 PM	SiCl4 post valve closed
7/9/2010	2:53:08 PM	Main Vac valve closed
7/9/2010	2:53:08 PM	Bubbler valve closed
7/9/2010	2:53:08 PM	Bypass valve opened
7/9/2010	2:53:08 PM	Helium MFC set to  0.000000
7/9/2010	2:53:08 PM	H2 MFC set to  0.000000
7/9/2010	2:53:08 PM	BCl3 MFC set to  0.000000
7/9/2010	2:53:08 PM	PHl3 MFC set to  0.000000
7/9/2010	2:53:08 PM	SiCl4 MFC set to  0.000000
7/9/2010	2:53:08 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	2:53:08 PM	Tube furnace set to 0
7/9/2010	2:53:08 PM	Helium valve closed
7/9/2010	2:53:08 PM	H2 valve closed
7/9/2010	2:53:08 PM	BCl3 valve closed
7/9/2010	2:53:08 PM	PH3 valve closed
7/9/2010	2:53:08 PM	SiCl4 pre valve closed
7/9/2010	2:53:08 PM	SiCl4 post valve closed
7/9/2010	2:53:08 PM	Bubbler valve closed
7/9/2010	2:53:08 PM	Main Vac valve opened
7/9/2010	2:53:08 PM	Bypass valve opened
7/9/2010	2:53:08 PM	Helium MFC set to  0.000000
7/9/2010	2:53:08 PM	H2 MFC set to  0.000000
7/9/2010	2:53:08 PM	BCl3 MFC set to  0.000000
7/9/2010	2:53:08 PM	PHl3 MFC set to  0.000000
7/9/2010	2:53:08 PM	SiCl4 MFC set to  0.000000
7/9/2010	2:53:08 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	2:53:08 PM	Tube furnace set to 0
7/9/2010	2:54:08 PM	H2 valve closed
7/9/2010	2:54:08 PM	BCl3 valve closed
7/9/2010	2:54:08 PM	PH3 valve closed
7/9/2010	2:54:08 PM	SiCl4 pre valve closed
7/9/2010	2:54:08 PM	SiCl4 post valve closed
7/9/2010	2:54:08 PM	Bubbler valve closed
7/9/2010	2:54:08 PM	Helium valve opened
7/9/2010	2:54:08 PM	Main Vac valve opened
7/9/2010	2:54:08 PM	Bypass valve opened
7/9/2010	2:54:08 PM	Helium MFC set to  100.000000
7/9/2010	2:54:08 PM	H2 MFC set to  0.000000
7/9/2010	2:54:08 PM	BCl3 MFC set to  0.000000
7/9/2010	2:54:08 PM	PHl3 MFC set to  0.000000
7/9/2010	2:54:08 PM	SiCl4 MFC set to  0.000000
7/9/2010	2:54:08 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	2:54:09 PM	Tube furnace set to 0
7/9/2010	3:03:09 PM	Helium valve closed
7/9/2010	3:03:09 PM	H2 valve closed
7/9/2010	3:03:09 PM	BCl3 valve closed
7/9/2010	3:03:09 PM	PH3 valve closed
7/9/2010	3:03:09 PM	SiCl4 pre valve closed
7/9/2010	3:03:09 PM	SiCl4 post valve closed
7/9/2010	3:03:09 PM	Bubbler valve closed
7/9/2010	3:03:09 PM	Main Vac valve opened
7/9/2010	3:03:09 PM	Bypass valve opened
7/9/2010	3:03:09 PM	Helium MFC set to  0.000000
7/9/2010	3:03:09 PM	H2 MFC set to  0.000000
7/9/2010	3:03:09 PM	BCl3 MFC set to  0.000000
7/9/2010	3:03:09 PM	PHl3 MFC set to  0.000000
7/9/2010	3:03:09 PM	SiCl4 MFC set to  0.000000
7/9/2010	3:03:09 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	3:03:09 PM	Tube furnace set to 0
7/9/2010	3:04:09 PM	H2 valve closed
7/9/2010	3:04:09 PM	BCl3 valve closed
7/9/2010	3:04:09 PM	PH3 valve closed
7/9/2010	3:04:09 PM	SiCl4 pre valve closed
7/9/2010	3:04:09 PM	SiCl4 post valve closed
7/9/2010	3:04:09 PM	Bubbler valve closed
7/9/2010	3:04:09 PM	Helium valve opened
7/9/2010	3:04:09 PM	Main Vac valve opened
7/9/2010	3:04:09 PM	Bypass valve opened
7/9/2010	3:04:09 PM	Helium MFC set to  100.000000
7/9/2010	3:04:09 PM	H2 MFC set to  0.000000
7/9/2010	3:04:09 PM	BCl3 MFC set to  0.000000
7/9/2010	3:04:09 PM	PHl3 MFC set to  0.000000
7/9/2010	3:04:09 PM	SiCl4 MFC set to  0.000000
7/9/2010	3:04:09 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	3:04:09 PM	Tube furnace set to 0
7/9/2010	3:13:09 PM	Helium valve closed
7/9/2010	3:13:09 PM	H2 valve closed
7/9/2010	3:13:09 PM	BCl3 valve closed
7/9/2010	3:13:09 PM	PH3 valve closed
7/9/2010	3:13:09 PM	SiCl4 pre valve closed
7/9/2010	3:13:09 PM	SiCl4 post valve closed
7/9/2010	3:13:09 PM	Bubbler valve closed
7/9/2010	3:13:09 PM	Main Vac valve opened
7/9/2010	3:13:09 PM	Bypass valve opened
7/9/2010	3:13:09 PM	Helium MFC set to  0.000000
7/9/2010	3:13:09 PM	H2 MFC set to  0.000000
7/9/2010	3:13:09 PM	BCl3 MFC set to  0.000000
7/9/2010	3:13:09 PM	PHl3 MFC set to  0.000000
7/9/2010	3:13:09 PM	SiCl4 MFC set to  0.000000
7/9/2010	3:13:09 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	3:13:09 PM	Tube furnace set to 0
7/9/2010	3:14:09 PM	H2 valve closed
7/9/2010	3:14:09 PM	BCl3 valve closed
7/9/2010	3:14:09 PM	PH3 valve closed
7/9/2010	3:14:09 PM	SiCl4 pre valve closed
7/9/2010	3:14:09 PM	SiCl4 post valve closed
7/9/2010	3:14:09 PM	Bubbler valve closed
7/9/2010	3:14:09 PM	Helium valve opened
7/9/2010	3:14:09 PM	Main Vac valve opened
7/9/2010	3:14:09 PM	Bypass valve opened
7/9/2010	3:14:09 PM	Helium MFC set to  100.000000
7/9/2010	3:14:09 PM	H2 MFC set to  0.000000
7/9/2010	3:14:09 PM	BCl3 MFC set to  0.000000
7/9/2010	3:14:09 PM	PHl3 MFC set to  0.000000
7/9/2010	3:14:09 PM	SiCl4 MFC set to  0.000000
7/9/2010	3:14:09 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	3:14:09 PM	Tube furnace set to 0
7/9/2010	3:21:24 PM	Helium valve closed
7/9/2010	3:21:24 PM	H2 valve closed
7/9/2010	3:21:24 PM	BCl3 valve closed
7/9/2010	3:21:24 PM	PH3 valve closed
7/9/2010	3:21:24 PM	SiCl4 pre valve closed
7/9/2010	3:21:24 PM	SiCl4 post valve closed
7/9/2010	3:21:24 PM	Bubbler valve closed
7/9/2010	3:21:24 PM	Main Vac valve opened
7/9/2010	3:21:24 PM	Bypass valve opened
7/9/2010	3:21:24 PM	Helium MFC set to  0.000000
7/9/2010	3:21:24 PM	H2 MFC set to  0.000000
7/9/2010	3:21:24 PM	BCl3 MFC set to  0.000000
7/9/2010	3:21:24 PM	PHl3 MFC set to  0.000000
7/9/2010	3:21:24 PM	SiCl4 MFC set to  0.000000
7/9/2010	3:21:24 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	3:21:24 PM	Tube furnace set to 0
7/9/2010	3:21:25 PM	Run finished at 3:21 PM
7/9/2010	3:21:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/9/2010	3:22:45 PM	Recipe started at 3:22 PM
7/9/2010	3:22:45 PM	Helium valve closed
7/9/2010	3:22:45 PM	BCl3 valve closed
7/9/2010	3:22:45 PM	PH3 valve closed
7/9/2010	3:22:45 PM	SiCl4 pre valve closed
7/9/2010	3:22:45 PM	SiCl4 post valve closed
7/9/2010	3:22:45 PM	Main Vac valve closed
7/9/2010	3:22:45 PM	Bypass valve closed
7/9/2010	3:22:45 PM	Bubbler valve closed
7/9/2010	3:22:45 PM	H2 valve opened
7/9/2010	3:22:45 PM	Helium MFC set to  0.000000
7/9/2010	3:22:45 PM	H2 MFC set to  500.000000
7/9/2010	3:22:45 PM	BCl3 MFC set to  0.000000
7/9/2010	3:22:45 PM	PHl3 MFC set to  0.000000
7/9/2010	3:22:45 PM	SiCl4 MFC set to  0.000000
7/9/2010	3:22:45 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	3:22:45 PM	Tube furnace set to 1000
7/9/2010	3:24:05 PM	Helium valve closed
7/9/2010	3:24:05 PM	BCl3 valve closed
7/9/2010	3:24:05 PM	PH3 valve closed
7/9/2010	3:24:05 PM	SiCl4 pre valve closed
7/9/2010	3:24:05 PM	SiCl4 post valve closed
7/9/2010	3:24:05 PM	Main Vac valve closed
7/9/2010	3:24:05 PM	Bypass valve closed
7/9/2010	3:24:05 PM	H2 valve opened
7/9/2010	3:24:05 PM	Bubbler valve opened
7/9/2010	3:24:05 PM	Helium MFC set to  0.000000
7/9/2010	3:24:05 PM	H2 MFC set to  500.000000
7/9/2010	3:24:05 PM	BCl3 MFC set to  0.000000
7/9/2010	3:24:05 PM	PHl3 MFC set to  0.000000
7/9/2010	3:24:05 PM	SiCl4 MFC set to  0.000000
7/9/2010	3:24:05 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	3:24:05 PM	Tube furnace set to 1000
7/9/2010	3:44:05 PM	Helium valve closed
7/9/2010	3:44:05 PM	BCl3 valve closed
7/9/2010	3:44:05 PM	PH3 valve closed
7/9/2010	3:44:05 PM	Main Vac valve closed
7/9/2010	3:44:05 PM	Bypass valve closed
7/9/2010	3:44:05 PM	H2 valve opened
7/9/2010	3:44:05 PM	SiCl4 pre valve opened
7/9/2010	3:44:05 PM	SiCl4 post valve opened
7/9/2010	3:44:05 PM	Bubbler valve opened
7/9/2010	3:44:05 PM	Helium MFC set to  0.000000
7/9/2010	3:44:05 PM	H2 MFC set to  500.000000
7/9/2010	3:44:05 PM	BCl3 MFC set to  0.000000
7/9/2010	3:44:05 PM	PHl3 MFC set to  0.000000
7/9/2010	3:44:05 PM	SiCl4 MFC set to  34.000000
7/9/2010	3:44:05 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	3:44:06 PM	Tube furnace set to 1000
7/9/2010	3:59:06 PM	Helium valve closed
7/9/2010	3:59:06 PM	BCl3 valve closed
7/9/2010	3:59:06 PM	PH3 valve closed
7/9/2010	3:59:06 PM	SiCl4 pre valve closed
7/9/2010	3:59:06 PM	SiCl4 post valve closed
7/9/2010	3:59:06 PM	Main Vac valve closed
7/9/2010	3:59:06 PM	Bypass valve closed
7/9/2010	3:59:06 PM	H2 valve opened
7/9/2010	3:59:06 PM	Bubbler valve opened
7/9/2010	3:59:06 PM	Helium MFC set to  0.000000
7/9/2010	3:59:06 PM	H2 MFC set to  500.000000
7/9/2010	3:59:06 PM	BCl3 MFC set to  0.000000
7/9/2010	3:59:06 PM	PHl3 MFC set to  0.000000
7/9/2010	3:59:06 PM	SiCl4 MFC set to  0.000000
7/9/2010	3:59:06 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	3:59:06 PM	Tube furnace set to 750
7/9/2010	4:19:06 PM	H2 valve closed
7/9/2010	4:19:06 PM	BCl3 valve closed
7/9/2010	4:19:06 PM	PH3 valve closed
7/9/2010	4:19:06 PM	SiCl4 pre valve closed
7/9/2010	4:19:06 PM	SiCl4 post valve closed
7/9/2010	4:19:06 PM	Main Vac valve closed
7/9/2010	4:19:06 PM	Bypass valve closed
7/9/2010	4:19:06 PM	Helium valve opened
7/9/2010	4:19:06 PM	Bubbler valve opened
7/9/2010	4:19:06 PM	Helium MFC set to  500.000000
7/9/2010	4:19:06 PM	H2 MFC set to  0.000000
7/9/2010	4:19:06 PM	BCl3 MFC set to  0.000000
7/9/2010	4:19:06 PM	PHl3 MFC set to  0.000000
7/9/2010	4:19:06 PM	SiCl4 MFC set to  0.000000
7/9/2010	4:19:06 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	4:19:06 PM	Tube furnace set to 0
7/9/2010	4:39:06 PM	Helium valve closed
7/9/2010	4:39:06 PM	H2 valve closed
7/9/2010	4:39:06 PM	BCl3 valve closed
7/9/2010	4:39:06 PM	PH3 valve closed
7/9/2010	4:39:06 PM	SiCl4 pre valve closed
7/9/2010	4:39:06 PM	SiCl4 post valve closed
7/9/2010	4:39:06 PM	Main Vac valve closed
7/9/2010	4:39:06 PM	Bypass valve closed
7/9/2010	4:39:06 PM	Bubbler valve closed
7/9/2010	4:39:06 PM	Helium MFC set to  0.000000
7/9/2010	4:39:06 PM	H2 MFC set to  0.000000
7/9/2010	4:39:06 PM	BCl3 MFC set to  0.000000
7/9/2010	4:39:06 PM	PHl3 MFC set to  0.000000
7/9/2010	4:39:06 PM	SiCl4 MFC set to  0.000000
7/9/2010	4:39:06 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	4:39:06 PM	Tube furnace set to 0
7/9/2010	4:39:06 PM	Run finished at 4:39 PM
7/9/2010	4:40:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/9/2010	4:40:31 PM	Recipe started at 4:40 PM
7/9/2010	4:40:31 PM	Helium valve closed
7/9/2010	4:40:31 PM	H2 valve closed
7/9/2010	4:40:31 PM	BCl3 valve closed
7/9/2010	4:40:31 PM	PH3 valve closed
7/9/2010	4:40:31 PM	SiCl4 pre valve closed
7/9/2010	4:40:31 PM	SiCl4 post valve closed
7/9/2010	4:40:31 PM	Main Vac valve closed
7/9/2010	4:40:31 PM	Bubbler valve closed
7/9/2010	4:40:31 PM	Bypass valve opened
7/9/2010	4:40:31 PM	Helium MFC set to  0.000000
7/9/2010	4:40:31 PM	H2 MFC set to  0.000000
7/9/2010	4:40:31 PM	BCl3 MFC set to  0.000000
7/9/2010	4:40:31 PM	PHl3 MFC set to  0.000000
7/9/2010	4:40:31 PM	SiCl4 MFC set to  0.000000
7/9/2010	4:40:31 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	4:40:31 PM	Tube furnace set to 0
7/9/2010	4:41:19 PM	Helium valve closed
7/9/2010	4:41:19 PM	H2 valve closed
7/9/2010	4:41:19 PM	BCl3 valve closed
7/9/2010	4:41:19 PM	PH3 valve closed
7/9/2010	4:41:19 PM	SiCl4 pre valve closed
7/9/2010	4:41:19 PM	SiCl4 post valve closed
7/9/2010	4:41:19 PM	Bubbler valve closed
7/9/2010	4:41:19 PM	Main Vac valve opened
7/9/2010	4:41:19 PM	Bypass valve opened
7/9/2010	4:41:19 PM	Helium MFC set to  0.000000
7/9/2010	4:41:19 PM	H2 MFC set to  0.000000
7/9/2010	4:41:19 PM	BCl3 MFC set to  0.000000
7/9/2010	4:41:19 PM	PHl3 MFC set to  0.000000
7/9/2010	4:41:19 PM	SiCl4 MFC set to  0.000000
7/9/2010	4:41:19 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	4:41:19 PM	Tube furnace set to 0
7/9/2010	4:41:20 PM	Run finished at 4:41 PM
7/9/2010	4:41:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/9/2010	4:42:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/9/2010	4:42:46 PM	Recipe started at 4:42 PM
7/9/2010	4:42:46 PM	Helium valve closed
7/9/2010	4:42:46 PM	H2 valve closed
7/9/2010	4:42:46 PM	BCl3 valve closed
7/9/2010	4:42:46 PM	PH3 valve closed
7/9/2010	4:42:46 PM	SiCl4 pre valve closed
7/9/2010	4:42:46 PM	SiCl4 post valve closed
7/9/2010	4:42:46 PM	Main Vac valve closed
7/9/2010	4:42:46 PM	Bubbler valve closed
7/9/2010	4:42:46 PM	Bypass valve opened
7/9/2010	4:42:46 PM	Helium MFC set to  0.000000
7/9/2010	4:42:46 PM	H2 MFC set to  0.000000
7/9/2010	4:42:46 PM	BCl3 MFC set to  0.000000
7/9/2010	4:42:46 PM	PHl3 MFC set to  0.000000
7/9/2010	4:42:46 PM	SiCl4 MFC set to  0.000000
7/9/2010	4:42:46 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	4:42:46 PM	Tube furnace set to 0
7/9/2010	4:42:47 PM	Helium valve closed
7/9/2010	4:42:47 PM	H2 valve closed
7/9/2010	4:42:47 PM	BCl3 valve closed
7/9/2010	4:42:47 PM	PH3 valve closed
7/9/2010	4:42:47 PM	SiCl4 pre valve closed
7/9/2010	4:42:47 PM	SiCl4 post valve closed
7/9/2010	4:42:47 PM	Bubbler valve closed
7/9/2010	4:42:47 PM	Main Vac valve opened
7/9/2010	4:42:47 PM	Bypass valve opened
7/9/2010	4:42:47 PM	Helium MFC set to  0.000000
7/9/2010	4:42:47 PM	H2 MFC set to  0.000000
7/9/2010	4:42:47 PM	BCl3 MFC set to  0.000000
7/9/2010	4:42:47 PM	PHl3 MFC set to  0.000000
7/9/2010	4:42:47 PM	SiCl4 MFC set to  0.000000
7/9/2010	4:42:47 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	4:42:47 PM	Tube furnace set to 0
7/9/2010	4:43:47 PM	H2 valve closed
7/9/2010	4:43:47 PM	BCl3 valve closed
7/9/2010	4:43:47 PM	PH3 valve closed
7/9/2010	4:43:47 PM	SiCl4 pre valve closed
7/9/2010	4:43:47 PM	SiCl4 post valve closed
7/9/2010	4:43:47 PM	Bubbler valve closed
7/9/2010	4:43:47 PM	Helium valve opened
7/9/2010	4:43:47 PM	Main Vac valve opened
7/9/2010	4:43:47 PM	Bypass valve opened
7/9/2010	4:43:47 PM	Helium MFC set to  100.000000
7/9/2010	4:43:47 PM	H2 MFC set to  0.000000
7/9/2010	4:43:47 PM	BCl3 MFC set to  0.000000
7/9/2010	4:43:47 PM	PHl3 MFC set to  0.000000
7/9/2010	4:43:47 PM	SiCl4 MFC set to  0.000000
7/9/2010	4:43:47 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	4:43:47 PM	Tube furnace set to 0
7/9/2010	4:52:47 PM	Helium valve closed
7/9/2010	4:52:47 PM	H2 valve closed
7/9/2010	4:52:47 PM	BCl3 valve closed
7/9/2010	4:52:47 PM	PH3 valve closed
7/9/2010	4:52:47 PM	SiCl4 pre valve closed
7/9/2010	4:52:47 PM	SiCl4 post valve closed
7/9/2010	4:52:47 PM	Bubbler valve closed
7/9/2010	4:52:47 PM	Main Vac valve opened
7/9/2010	4:52:47 PM	Bypass valve opened
7/9/2010	4:52:47 PM	Helium MFC set to  0.000000
7/9/2010	4:52:47 PM	H2 MFC set to  0.000000
7/9/2010	4:52:47 PM	BCl3 MFC set to  0.000000
7/9/2010	4:52:47 PM	PHl3 MFC set to  0.000000
7/9/2010	4:52:47 PM	SiCl4 MFC set to  0.000000
7/9/2010	4:52:47 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	4:52:47 PM	Tube furnace set to 0
7/9/2010	4:53:47 PM	H2 valve closed
7/9/2010	4:53:47 PM	BCl3 valve closed
7/9/2010	4:53:47 PM	PH3 valve closed
7/9/2010	4:53:47 PM	SiCl4 pre valve closed
7/9/2010	4:53:47 PM	SiCl4 post valve closed
7/9/2010	4:53:47 PM	Bubbler valve closed
7/9/2010	4:53:47 PM	Helium valve opened
7/9/2010	4:53:47 PM	Main Vac valve opened
7/9/2010	4:53:47 PM	Bypass valve opened
7/9/2010	4:53:47 PM	Helium MFC set to  100.000000
7/9/2010	4:53:47 PM	H2 MFC set to  0.000000
7/9/2010	4:53:47 PM	BCl3 MFC set to  0.000000
7/9/2010	4:53:47 PM	PHl3 MFC set to  0.000000
7/9/2010	4:53:47 PM	SiCl4 MFC set to  0.000000
7/9/2010	4:53:47 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	4:53:47 PM	Tube furnace set to 0
7/9/2010	5:02:47 PM	Helium valve closed
7/9/2010	5:02:47 PM	H2 valve closed
7/9/2010	5:02:47 PM	BCl3 valve closed
7/9/2010	5:02:47 PM	PH3 valve closed
7/9/2010	5:02:47 PM	SiCl4 pre valve closed
7/9/2010	5:02:47 PM	SiCl4 post valve closed
7/9/2010	5:02:47 PM	Bubbler valve closed
7/9/2010	5:02:47 PM	Main Vac valve opened
7/9/2010	5:02:47 PM	Bypass valve opened
7/9/2010	5:02:47 PM	Helium MFC set to  0.000000
7/9/2010	5:02:47 PM	H2 MFC set to  0.000000
7/9/2010	5:02:47 PM	BCl3 MFC set to  0.000000
7/9/2010	5:02:47 PM	PHl3 MFC set to  0.000000
7/9/2010	5:02:47 PM	SiCl4 MFC set to  0.000000
7/9/2010	5:02:47 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	5:02:48 PM	Tube furnace set to 0
7/9/2010	5:03:48 PM	H2 valve closed
7/9/2010	5:03:48 PM	BCl3 valve closed
7/9/2010	5:03:48 PM	PH3 valve closed
7/9/2010	5:03:48 PM	SiCl4 pre valve closed
7/9/2010	5:03:48 PM	SiCl4 post valve closed
7/9/2010	5:03:48 PM	Bubbler valve closed
7/9/2010	5:03:48 PM	Helium valve opened
7/9/2010	5:03:48 PM	Main Vac valve opened
7/9/2010	5:03:48 PM	Bypass valve opened
7/9/2010	5:03:48 PM	Helium MFC set to  100.000000
7/9/2010	5:03:48 PM	H2 MFC set to  0.000000
7/9/2010	5:03:48 PM	BCl3 MFC set to  0.000000
7/9/2010	5:03:48 PM	PHl3 MFC set to  0.000000
7/9/2010	5:03:48 PM	SiCl4 MFC set to  0.000000
7/9/2010	5:03:48 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	5:03:48 PM	Tube furnace set to 0
7/9/2010	5:12:48 PM	Helium valve closed
7/9/2010	5:12:48 PM	H2 valve closed
7/9/2010	5:12:48 PM	BCl3 valve closed
7/9/2010	5:12:48 PM	PH3 valve closed
7/9/2010	5:12:48 PM	SiCl4 pre valve closed
7/9/2010	5:12:48 PM	SiCl4 post valve closed
7/9/2010	5:12:48 PM	Bubbler valve closed
7/9/2010	5:12:48 PM	Main Vac valve opened
7/9/2010	5:12:48 PM	Bypass valve opened
7/9/2010	5:12:48 PM	Helium MFC set to  0.000000
7/9/2010	5:12:48 PM	H2 MFC set to  0.000000
7/9/2010	5:12:48 PM	BCl3 MFC set to  0.000000
7/9/2010	5:12:48 PM	PHl3 MFC set to  0.000000
7/9/2010	5:12:48 PM	SiCl4 MFC set to  0.000000
7/9/2010	5:12:48 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	5:12:48 PM	Tube furnace set to 0
7/9/2010	5:12:49 PM	Run finished at 5:12 PM
7/9/2010	5:12:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
7/9/2010	5:22:43 PM	Recipe started at 5:22 PM
7/9/2010	5:22:43 PM	Helium valve closed
7/9/2010	5:22:43 PM	BCl3 valve closed
7/9/2010	5:22:43 PM	PH3 valve closed
7/9/2010	5:22:43 PM	SiCl4 pre valve closed
7/9/2010	5:22:43 PM	SiCl4 post valve closed
7/9/2010	5:22:43 PM	Main Vac valve closed
7/9/2010	5:22:43 PM	Bypass valve closed
7/9/2010	5:22:43 PM	Bubbler valve closed
7/9/2010	5:22:43 PM	H2 valve opened
7/9/2010	5:22:43 PM	Helium MFC set to  0.000000
7/9/2010	5:22:43 PM	H2 MFC set to  500.000000
7/9/2010	5:22:43 PM	BCl3 MFC set to  0.000000
7/9/2010	5:22:43 PM	PHl3 MFC set to  0.000000
7/9/2010	5:22:43 PM	SiCl4 MFC set to  0.000000
7/9/2010	5:22:43 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	5:22:43 PM	Tube furnace set to 1000
7/9/2010	5:24:01 PM	Helium valve closed
7/9/2010	5:24:01 PM	BCl3 valve closed
7/9/2010	5:24:01 PM	PH3 valve closed
7/9/2010	5:24:01 PM	SiCl4 pre valve closed
7/9/2010	5:24:01 PM	SiCl4 post valve closed
7/9/2010	5:24:01 PM	Main Vac valve closed
7/9/2010	5:24:01 PM	Bypass valve closed
7/9/2010	5:24:01 PM	H2 valve opened
7/9/2010	5:24:01 PM	Bubbler valve opened
7/9/2010	5:24:01 PM	Helium MFC set to  0.000000
7/9/2010	5:24:01 PM	H2 MFC set to  500.000000
7/9/2010	5:24:01 PM	BCl3 MFC set to  0.000000
7/9/2010	5:24:01 PM	PHl3 MFC set to  0.000000
7/9/2010	5:24:01 PM	SiCl4 MFC set to  0.000000
7/9/2010	5:24:01 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	5:24:01 PM	Tube furnace set to 1000
7/9/2010	5:44:01 PM	Helium valve closed
7/9/2010	5:44:01 PM	BCl3 valve closed
7/9/2010	5:44:01 PM	PH3 valve closed
7/9/2010	5:44:01 PM	Main Vac valve closed
7/9/2010	5:44:01 PM	Bypass valve closed
7/9/2010	5:44:01 PM	H2 valve opened
7/9/2010	5:44:01 PM	SiCl4 pre valve opened
7/9/2010	5:44:01 PM	SiCl4 post valve opened
7/9/2010	5:44:01 PM	Bubbler valve opened
7/9/2010	5:44:01 PM	Helium MFC set to  0.000000
7/9/2010	5:44:01 PM	H2 MFC set to  500.000000
7/9/2010	5:44:01 PM	BCl3 MFC set to  0.000000
7/9/2010	5:44:01 PM	PHl3 MFC set to  0.000000
7/9/2010	5:44:01 PM	SiCl4 MFC set to  34.000000
7/9/2010	5:44:01 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	5:44:01 PM	Tube furnace set to 1000
7/9/2010	5:59:01 PM	Helium valve closed
7/9/2010	5:59:01 PM	BCl3 valve closed
7/9/2010	5:59:01 PM	PH3 valve closed
7/9/2010	5:59:01 PM	SiCl4 pre valve closed
7/9/2010	5:59:01 PM	SiCl4 post valve closed
7/9/2010	5:59:01 PM	Main Vac valve closed
7/9/2010	5:59:01 PM	Bypass valve closed
7/9/2010	5:59:01 PM	H2 valve opened
7/9/2010	5:59:01 PM	Bubbler valve opened
7/9/2010	5:59:01 PM	Helium MFC set to  0.000000
7/9/2010	5:59:01 PM	H2 MFC set to  500.000000
7/9/2010	5:59:01 PM	BCl3 MFC set to  0.000000
7/9/2010	5:59:01 PM	PHl3 MFC set to  0.000000
7/9/2010	5:59:01 PM	SiCl4 MFC set to  0.000000
7/9/2010	5:59:01 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	5:59:01 PM	Tube furnace set to 750
7/9/2010	6:19:01 PM	H2 valve closed
7/9/2010	6:19:01 PM	BCl3 valve closed
7/9/2010	6:19:01 PM	PH3 valve closed
7/9/2010	6:19:01 PM	SiCl4 pre valve closed
7/9/2010	6:19:01 PM	SiCl4 post valve closed
7/9/2010	6:19:01 PM	Main Vac valve closed
7/9/2010	6:19:01 PM	Bypass valve closed
7/9/2010	6:19:01 PM	Helium valve opened
7/9/2010	6:19:01 PM	Bubbler valve opened
7/9/2010	6:19:01 PM	Helium MFC set to  500.000000
7/9/2010	6:19:01 PM	H2 MFC set to  0.000000
7/9/2010	6:19:01 PM	BCl3 MFC set to  0.000000
7/9/2010	6:19:01 PM	PHl3 MFC set to  0.000000
7/9/2010	6:19:01 PM	SiCl4 MFC set to  0.000000
7/9/2010	6:19:01 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	6:19:02 PM	Tube furnace set to 0
7/9/2010	6:39:01 PM	Helium valve closed
7/9/2010	6:39:01 PM	H2 valve closed
7/9/2010	6:39:02 PM	BCl3 valve closed
7/9/2010	6:39:02 PM	PH3 valve closed
7/9/2010	6:39:02 PM	SiCl4 pre valve closed
7/9/2010	6:39:02 PM	SiCl4 post valve closed
7/9/2010	6:39:02 PM	Main Vac valve closed
7/9/2010	6:39:02 PM	Bypass valve closed
7/9/2010	6:39:02 PM	Bubbler valve closed
7/9/2010	6:39:02 PM	Helium MFC set to  0.000000
7/9/2010	6:39:02 PM	H2 MFC set to  0.000000
7/9/2010	6:39:02 PM	BCl3 MFC set to  0.000000
7/9/2010	6:39:02 PM	PHl3 MFC set to  0.000000
7/9/2010	6:39:02 PM	SiCl4 MFC set to  0.000000
7/9/2010	6:39:02 PM	Bypass solenoid MFC set to  0.000000
7/9/2010	6:39:02 PM	Tube furnace set to 0
7/9/2010	6:39:02 PM	Run finished at 6:39 PM
